서브메뉴
검색
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Hyosang Lee
- 서명/저자
- Development of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System / Hyosang Lee , 공저 Darren DeNardis , Ara Philipossian , Yoshiyuki Seike , Mineo Takaoka , Keiji Miyachi , Toshiro Do
- 발행사항
- 서울 : 한국전기전자재료학회, 2008.
- 형태사항
- pp. 26-31
- 주기사항
- 참고문헌 수록
- 기타저자
- Darren DeNardis , Ara Philipossian , Yoshiyuki Seike , Mineo Takaoka , Keiji Miyachi , Toshiro Do
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230061
MARC
008190725s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aHyosang Lee
■24510▼aDevelopment of a Pad Conditioning Method for ILD CMP using a High Pressure Micro Jet System▼dHyosang Lee ▼e공저 Darren DeNardis , Ara Philipossian , Yoshiyuki Seike , Mineo Takaoka , Keiji Miyachi , Toshiro Do
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 26-31
■500 ▼a참고문헌 수록
■7001 ▼aDarren DeNardis , Ara Philipossian , Yoshiyuki Seike , Mineo Takaoka , Keiji Miyachi , Toshiro Do
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.1 (2007 February)▼d2008, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS037648▼b60055341▼h8▼s2▼fP
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Info Détail de la recherche.
- Réservation
- n'existe pas
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
