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Development of Multiple CMP Monitoring System for Consumable Designs
Development of Multiple CMP Monitoring System for Consumable Designs
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sun Joon Park
- Title/Author
- Development of Multiple CMP Monitoring System for Consumable Designs / Sun Joon Park ; 공저 Boum Young Park , Sung Ryul Kim , Hae Do Jeong , Hyoung Jae Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2008.
- Material Info
- pp. 11-14
- General Note
- 참고문헌수록
- Added Entry-Personal Name
- Boum Young Park , Sung Ryul Kim , Hae Do Jeong , Hyoung Jae Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.8, No.1 (2007 February) 2008, 02
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230057
MARC
008190725s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aSun Joon Park
■24510▼aDevelopment of Multiple CMP Monitoring System for Consumable Designs▼dSun Joon Park ▼e공저 Boum Young Park , Sung Ryul Kim , Hae Do Jeong , Hyoung Jae Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 11-14
■500 ▼a참고문헌수록
■7001 ▼aBoum Young Park , Sung Ryul Kim , Hae Do Jeong , Hyoung Jae Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.1 (2007 February)▼d2008, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS037648▼b60055341▼h8▼s2▼fP
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