서브메뉴
검색
Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Hyo Sang Lee
- Title/Author
- Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy / Hyo Sang Lee ; 공저 Ara Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
- Publish Info
- 서울 : 한국전기전자재료학회, 2008.
- Material Info
- pp. 5-10
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Ara Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.8, No.1 (2007 February) 2008, 02
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230056
MARC
008190725s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aHyo Sang Lee
■24510▼aStudy of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy▼dHyo Sang Lee ▼e공저 Ara Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 5-10
■500 ▼a참고문헌 수록
■7001 ▼aAra Philipossian , Suryadevara V. Babu , Udaya B. Patri , Youngki Hong , Laertis Economikos , Michael Goldstein
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.1 (2007 February)▼d2008, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS037648▼b60055341▼h8▼s2▼fP
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
