서브메뉴
검색
Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization
Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Y. Stefanov
- 서명/저자
- Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization / Y. Stefanov , 공저 F. Cilek , R. Endres , U. Schwalke
- 발행사항
- 서울 : 한국전기전자재료학회, 2008.
- 형태사항
- pp. 1-4
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230055
MARC
008190725s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aY. Stefanov
■24510▼aAlternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization▼dY. Stefanov▼e공저 F. Cilek , R. Endres , U. Schwalke
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 1-4
■500 ▼a참고문헌 수록
■7001 ▼aF. Cilek , R. Endres , U. Schwalke
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.1 (2007 February)▼d2008, 02
■856 ▼uhttp:// society.kordic.re.kr
■SIS ▼aS037648▼b60055341▼h8▼s2▼fP
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Подробнее информация.
- Бронирование
- не существует
- моя папка
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
