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Regular Paper : Process Effect on the RMS Roughness of HfO2 Thin Films Grown by MOMBE
Regular Paper : Process Effect on the RMS Roughness of HfO2 Thin Films Grown by MOMBE
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Young Don Ko
- 서명/저자
- Regular Paper : Process Effect on the RMS Roughness of HfO2 Thin Films Grown by MOMBE / Young Don Ko , 공저 Pyung Moon , Il Gu Yun , Moon Ho Ham , Jae Min Myoung
- 발행사항
- 서울 : 한국전기전자재료학회, 2008.
- 형태사항
- pp. 58-66
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60229329
MARC
008190717s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aYoung Don Ko
■24510▼aRegular Paper : Process Effect on the RMS Roughness of HfO2 Thin Films Grown by MOMBE▼dYoung Don Ko▼e공저 Pyung Moon , Il Gu Yun , Moon Ho Ham , Jae Min Myoung
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 58-66
■500 ▼a참고문헌 수록
■7001 ▼aPyung Moon , Il Gu Yun , Moon Ho Ham , Jae Min Myoung
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.2 (2007 April)▼d2008, 04
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS039766▼b60055341▼h8▼s2▼fP
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