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Regular Paper : Stress Dependence of Thermal Stability of Nickel Silicide for Nano MOSFETs
Regular Paper : Stress Dependence of Thermal Stability of Nickel Silicide for Nano MOSFETs
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Ying Ying Zhang
- 서명/저자
- Regular Paper : Stress Dependence of Thermal Stability of Nickel Silicide for Nano MOSFETs / Ying Ying Zhang , 공저 Won Jae Lee , Zhun Zhong , Shi Guang Li , Soon Yen Jung , Ga Won Lee , Jin Suk Wang , Hi Deok Lee , Sung Kyu Lim
- 발행사항
- 서울 : 한국전기전자재료학회, 2008.
- 형태사항
- pp. 110-114
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60229316
MARC
008190717s2008 ulk aa eng■022 ▼a12297607
■1001 ▼aYing Ying Zhang
■24510▼aRegular Paper : Stress Dependence of Thermal Stability of Nickel Silicide for Nano MOSFETs▼dYing Ying Zhang ▼e공저 Won Jae Lee , Zhun Zhong , Shi Guang Li , Soon Yen Jung , Ga Won Lee , Jin Suk Wang , Hi Deok Lee , Sung Kyu Lim
■260 ▼a서울▼b한국전기전자재료학회▼c2008.
■300 ▼app. 110-114
■500 ▼a참고문헌 수록
■7001 ▼aWon Jae Lee , Zhun Zhong , Shi Guang Li , Soon Yen Jung , Ga Won Lee , Jin Suk Wang , Hi Deok Lee , Sung Kyu Lim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.8, No.3 (2007 June)▼d2008, 06
■856 ▼uhttp://kieeme.or.kr
■SIS ▼aS040878▼b60055341▼h8▼s2▼fP
