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Regular Paper : Electrical and Optical Properties of ITO Films Sputtered by RF-bias Voltage and In-Sn Alloy Target
Regular Paper : Electrical and Optical Properties of ITO Films Sputtered by RF-bias Voltage and In-Sn Alloy Target
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Hyun Hoo Kim
- Title/Author
- Regular Paper : Electrical and Optical Properties of ITO Films Sputtered by RF-bias Voltage and In-Sn Alloy Target / Hyun Hoo Kim ; 공저 Sung Ho Shin
- Publish Info
- 서울 : 한국전기전자재료학회, 2005.
- Material Info
- pp. 153-157
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Sung Ho Shin
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.5, No.4 (2004 August) 2005, 08
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60229231
MARC
008190716s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aHyun Hoo Kim
■24510▼aRegular Paper : Electrical and Optical Properties of ITO Films Sputtered by RF-bias Voltage and In-Sn Alloy Target▼dHyun Hoo Kim▼e공저 Sung Ho Shin
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 153-157
■500 ▼a참고문헌 수록
■7001 ▼aSung Ho Shin
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.5, No.4 (2004 August)▼d2005, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014509▼b60055341▼h8▼s2▼fP
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