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Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles
Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles
Detailed Information
- 자료유형
- 기사
- ISSN
- 12298557
- 저자명
- Jooho Hwang
- 서명/저자
- Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles / Jooho Hwang , 공저 Chun-Hong Park, Seung-Woo Kim
- 발행사항
- 서울 : 한국정밀공학회, 2007.
- 형태사항
- pp. 64-69
- 주기사항
- 권말 참고문헌 수록
- 기본자료저록
- International Journal of Precision Engineering and Manufactoring : Vol. 8 No. 2 (2007. 4) 2007, 04
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60220436
MARC
008190610s2007 ulk aa eng■022 ▼a12298557
■1001 ▼aJooho Hwang
■24510▼aEstimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles▼dJooho Hwang▼e공저 Chun-Hong Park, Seung-Woo Kim
■260 ▼a서울▼b한국정밀공학회▼c2007.
■300 ▼app. 64-69
■500 ▼a권말 참고문헌 수록
■7001 ▼aChun-Hong Park, Seung-Woo Kim
■773 ▼tInternational Journal of Precision Engineering and Manufactoring▼gVol. 8 No. 2 (2007. 4)▼d2007, 04
■856 ▼uhttp://www.kspe.or.kr
■SIS ▼aS037795▼b60078690▼h8▼s2▼fP
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