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Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces
Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces
Detailed Information
- 자료유형
- 기사
- ISSN
- 12298557
- 저자명
- Hiromi ISOBE
- 서명/저자
- Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces / Hiromi ISOBE , 공저 Masaaki FUSHMI, Masami OOTSUKA, Akira KYUSOJIN
- 발행사항
- 서울 : 한국정밀공학회, 2007.
- 형태사항
- pp. 44-48
- 주기사항
- 권말 참고문헌 수록
- 기본자료저록
- International Journal of Precision Engineering and Manufactoring : Vol. 8 No. 2 (2007. 4) 2007, 04
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60220423
MARC
008190610s2007 ulk aa eng■022 ▼a12298557
■1001 ▼aHiromi ISOBE
■24510▼aNon-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces▼dHiromi ISOBE▼e공저 Masaaki FUSHMI, Masami OOTSUKA, Akira KYUSOJIN
■260 ▼a서울▼b한국정밀공학회▼c2007.
■300 ▼app. 44-48
■500 ▼a권말 참고문헌 수록
■7001 ▼aMasaaki FUSHMI, Masami OOTSUKA, Akira KYUSOJIN
■773 ▼tInternational Journal of Precision Engineering and Manufactoring▼gVol. 8 No. 2 (2007. 4)▼d2007, 04
■856 ▼uhttp://www.kspe.or.kr
■SIS ▼aS037795▼b60078690▼h8▼s2▼fP
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