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A Dual-mode Pico-positioning System using Active Aerostatic Coupling
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
Detailed Information
- 자료유형
- 기사
- ISSN
- 12298557
- 저자명
- Hiroshi Mizumoto
- 서명/저자
- A Dual-mode Pico-positioning System using Active Aerostatic Coupling / Hiroshi Mizumoto , 공저 Yoshito Yabuta, Shiro Arii, Makoto Yabuya, Yoichi Tazoe
- 발행사항
- 서울 : 한국정밀공학회, 2007.
- 형태사항
- pp. 32-37
- 주기사항
- 권말 참고문헌 수록
- 기본자료저록
- International Journal of Precision Engineering and Manufactoring : Vol. 8 No. 2 (2007. 4) 2007, 04
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60220418
MARC
008190610s2007 ulk aa eng■022 ▼a12298557
■1001 ▼aHiroshi Mizumoto
■24510▼aA Dual-mode Pico-positioning System using Active Aerostatic Coupling▼dHiroshi Mizumoto▼e공저 Yoshito Yabuta, Shiro Arii, Makoto Yabuya, Yoichi Tazoe
■260 ▼a서울▼b한국정밀공학회▼c2007.
■300 ▼app. 32-37
■500 ▼a권말 참고문헌 수록
■7001 ▼aYoshito Yabuta, Shiro Arii, Makoto Yabuya, Yoichi Tazoe
■773 ▼tInternational Journal of Precision Engineering and Manufactoring▼gVol. 8 No. 2 (2007. 4)▼d2007, 04
■856 ▼uhttp://www.kspe.or.kr
■SIS ▼aS037795▼b60078690▼h8▼s2▼fP
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