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Application of plasma modeling for semiconductor industry
Application of plasma modeling for semiconductor industry
Detailed Information
- 자료유형
- 기사
- ISSN
- 12267937
- 서명/저자
- Application of plasma modeling for semiconductor industry / alexandre efremov 저
- 발행사항
- 서울 : 한국전기전자재료학회, 2002.
- 형태사항
- pp. 10-14
- 주기사항
- 권말 참고문헌 있음
- 기본자료저록
- 전기전자재료(Bulletin of the Korean Institute of Electrical & Electron : 제15권 제9호 (2002. 9) 2002, 09
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60219639
MARC
008190605s2002 ulk aa kor■022 ▼a12267937
■1001 ▼aalexandre efremov
■24510▼aApplication of plasma modeling for semiconductor industry ▼dalexandre efremov 저
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 10-14
■500 ▼a권말 참고문헌 있음
■773 ▼t전기전자재료(Bulletin of the Korean Institute of Electrical & Electron▼g제15권 제9호 (2002. 9)▼d2002, 09
■856 ▼uhttp://www.kieeme.or.kr/
■SIS ▼aS014385▼b60055315▼h8▼s1▼fP
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