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선형열처리를 이용한 Si(100)/Si3N4∥Si (100) 기판쌍의 직접접합
선형열처리를 이용한 Si(100)/Si3N4∥Si (100) 기판쌍의 직접접합
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MARC
008190603s2001 ulk aa kor■022 ▼a12250562
■1001 ▼a이영민
■24510▼a선형열처리를 이용한 Si(100)/Si3N4∥Si (100) 기판쌍의 직접접합▼d이영민▼e송오성, 이상연 공저
■260 ▼a서울▼b한국재료학회▼c2001.
■300 ▼app. 427-430
■500 ▼a권말 색인및 참고문헌수록
■7001 ▼a송오성, 이상연
■773 ▼t한국재료학회지(Korean Journal of Materials Research)▼gVol. 11, No. 5, (2001 May)▼d2001, 05
■856 ▼uhttp:// www.mrs-k.or.kr
■SIS ▼aS014197▼b60055267▼h8▼s2▼fP
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