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An On-line Monitoring and Control System for Semiconductor Manufacturing Process Utilizing Fuzzy Rule Extraction
An On-line Monitoring and Control System for Semiconductor Manufacturing Process Utilizing Fuzzy Rule Extraction
Detailed Information
- Material Type
- 기사
- ISSN
- 12267937
- Author
- Jen-Cheng Chen
- Title/Author
- An On-line Monitoring and Control System for Semiconductor Manufacturing Process Utilizing Fuzzy Rule Extraction / Jen-Cheng Chen ; Ming Chang 공저
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 3-11
- General Note
- 권말 참고문헌 수록
- Added Entry-Personal Name
- Ming Chang
- Host Item Entry
- 전기전자재료(Bulletin of the Korean Institute of Electrical & Electron : 제20권 제2호 (2007. 2) 2007, 02
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60217052
MARC
008190530s2007 ulk aa kor■022 ▼a12267937
■1001 ▼aJen-Cheng Chen
■24510▼aAn On-line Monitoring and Control System for Semiconductor Manufacturing Process Utilizing Fuzzy Rule Extraction▼dJen-Cheng Chen▼eMing Chang 공저
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 3-11
■500 ▼a권말 참고문헌 수록
■7001 ▼aMing Chang
■773 ▼t전기전자재료(Bulletin of the Korean Institute of Electrical & Electron▼g제20권 제2호 (2007. 2)▼d2007, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS037449▼b60055315▼h8▼s2▼fP
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