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Thermal Decomposition of Tetrakis(ethylmethylamido) Titanium for Chemical Vapor Deposition of Titanium Nitride
Thermal Decomposition of Tetrakis(ethylmethylamido) Titanium for Chemical Vapor Deposition of Titanium Nitride
Detailed Information
- 자료유형
- 기사
- ISSN
- 02532964
- 저자명
- Kim, Seong-Jae
- 서명/저자
- Thermal Decomposition of Tetrakis(ethylmethylamido) Titanium for Chemical Vapor Deposition of Titanium Nitride / Kim, Seong-Jae , 공저 Kim, Bo-Hye,Woo, Hee-Gweon,Kim, Su-Kyung,Kim, Do-Heyoung
- 발행사항
- 서울 : 대한화학회, 2006.
- 형태사항
- pp. 219-223
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60205380
MARC
008190213s2006 ulk aa eng■022 ▼a02532964
■1001 ▼aKim, Seong-Jae
■24510▼aThermal Decomposition of Tetrakis(ethylmethylamido) Titanium for Chemical Vapor Deposition of Titanium Nitride▼dKim, Seong-Jae▼e공저 Kim, Bo-Hye,Woo, Hee-Gweon,Kim, Su-Kyung,Kim, Do-Heyoung
■260 ▼a서울▼b대한화학회▼c2006.
■300 ▼app. 219-223
■500 ▼a참고문헌 수록
■7001 ▼aKim, Bo-Hye,Woo, Hee-Gweon,Kim, Su-Kyung,Kim, Do-Heyoung
■773 ▼tBulletin of the Korean Chemical Society▼gVol. 27 No. 2 (2006년 2월)▼d2006, 02
■856 ▼uhttp://kcsnet.or.kr
■SIS ▼aS026792▼b60076772▼h8▼s2▼fP
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