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Molecular Emission of CF4 Gas in Low-pressure Inductively Coupled Plasma
Molecular Emission of CF4 Gas in Low-pressure Inductively Coupled Plasma
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MARC
008190208s2006 ulk aa eng■022 ▼a02532964
■1001 ▼aJung, T.Y
■24510▼aMolecular Emission of CF4 Gas in Low-pressure Inductively Coupled Plasma▼dJung, T.Y▼e공저 .,Kim, D.H.,Lim, H.B.
■260 ▼a서울▼b대한화학회▼c2006.
■300 ▼app. 373-375
■500 ▼a참고문헌 수록
■7001 ▼a.,Kim, D.H.,Lim, H.B.
■773 ▼tBulletin of the Korean Chemical Society▼gVol. 27 No. 3 (2006년 3월)▼d2006, 03
■856 ▼uhttp://kcsnet.or.kr
■SIS ▼aS026793▼b60076772▼h8▼s2▼fP
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