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Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Illhwan Kim
- 서명/저자
- Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications / Illhwan Kim , 공저 Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
- 발행사항
- 서울 : 대한전자공학회, 2005.
- 형태사항
- pp. 58-66
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202588
MARC
008190108s2005 ulk aa eng■022 ▼a15981657
■1001 ▼aIllhwan Kim
■24510▼aWafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications▼dIllhwan Kim▼e공저 Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
■260 ▼a서울▼b대한전자공학회▼c2005.
■300 ▼app. 58-66
■500 ▼a참고문헌 수록
■7001 ▼aSeonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 5, Number 1, (2005 March)▼d2005, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013705▼b60054120▼h8▼s2▼fP
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