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Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Detailed Information
- Material Type
- 기사
- ISSN
- 15981657
- Author
- Illhwan Kim
- Title/Author
- Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications / Illhwan Kim ; 공저 Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
- Publish Info
- 서울 : 대한전자공학회, 2005.
- Material Info
- pp. 58-66
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
- Host Item Entry
- Journal of Semiconductor Technology and Science : Volume 5, Number 1, (2005 March) 2005, 03
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202588
MARC
008190108s2005 ulk aa eng■022 ▼a15981657
■1001 ▼aIllhwan Kim
■24510▼aWafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications▼dIllhwan Kim▼e공저 Seonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
■260 ▼a서울▼b대한전자공학회▼c2005.
■300 ▼app. 58-66
■500 ▼a참고문헌 수록
■7001 ▼aSeonho Seok, Hyeon Cheol Kim, Moon Koo Kang, Kukjin Chun
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 5, Number 1, (2005 March)▼d2005, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013705▼b60054120▼h8▼s2▼fP
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