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Investigation of Pyrolyzed Polymide Thin Film as MEMS Material
Investigation of Pyrolyzed Polymide Thin Film as MEMS Material
Detailed Information
- Material Type
- 기사
- ISSN
- 15981657
- Author
- Keisuke Naka
- Title/Author
- Investigation of Pyrolyzed Polymide Thin Film as MEMS Material / Keisuke Naka ; 공저 Hideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
- Publish Info
- 서울 : 대한전자공학회, 2005.
- Material Info
- pp. 38-44
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Hideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
- Host Item Entry
- Journal of Semiconductor Technology and Science : Volume 5, Number 1, (2005 March) 2005, 03
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202585
MARC
008190108s2005 ulk aa eng■022 ▼a15981657
■1001 ▼aKeisuke Naka
■24510▼aInvestigation of Pyrolyzed Polymide Thin Film as MEMS Material▼dKeisuke Naka▼e공저 Hideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
■260 ▼a서울▼b대한전자공학회▼c2005.
■300 ▼app. 38-44
■500 ▼a참고문헌 수록
■7001 ▼aHideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 5, Number 1, (2005 March)▼d2005, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013705▼b60054120▼h8▼s2▼fP
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