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Investigation of Pyrolyzed Polymide Thin Film as MEMS Material
Investigation of Pyrolyzed Polymide Thin Film as MEMS Material
상세정보
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Keisuke Naka
- 서명/저자
- Investigation of Pyrolyzed Polymide Thin Film as MEMS Material / Keisuke Naka , 공저 Hideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
- 발행사항
- 서울 : 대한전자공학회, 2005.
- 형태사항
- pp. 38-44
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202585
MARC
008190108s2005 ulk aa eng■022 ▼a15981657
■1001 ▼aKeisuke Naka
■24510▼aInvestigation of Pyrolyzed Polymide Thin Film as MEMS Material▼dKeisuke Naka▼e공저 Hideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
■260 ▼a서울▼b대한전자공학회▼c2005.
■300 ▼app. 38-44
■500 ▼a참고문헌 수록
■7001 ▼aHideki Nagae, Masao Ichiyanagi, OK Chan Jeong, Satoshi Konishi
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 5, Number 1, (2005 March)▼d2005, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013705▼b60054120▼h8▼s2▼fP
