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The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits
The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Karl J. Ma
- 서명/저자
- The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits / Karl J. Ma , 공저 Yogesh B. Gianchandani, Khalil Najafi
- 발행사항
- 서울 : 대한전자공학회, 2002.
- 형태사항
- pp. 273-279
- 주기사항
- 참고문헌 수록
- 기본자료저록
- Journal of Semiconductor Technology and Science : Volume 2, Number 4, (2002 December) 2002, 12
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202533
MARC
008190108s2002 ulk aa eng■022 ▼a15981657
■1001 ▼aKarl J. Ma
■24510▼aThe Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits▼dKarl J. Ma▼e공저 Yogesh B. Gianchandani, Khalil Najafi
■260 ▼a서울▼b대한전자공학회▼c2002.
■300 ▼app. 273-279
■500 ▼a참고문헌 수록
■7001 ▼aYogesh B. Gianchandani, Khalil Najafi
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 2, Number 4, (2002 December)▼d2002, 12
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013696▼b60054120▼h8▼s2▼fP
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