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The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits
The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits
Detailed Information
- Material Type
- 기사
- ISSN
- 15981657
- Author
- Karl J. Ma
- Title/Author
- The Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits / Karl J. Ma ; 공저 Yogesh B. Gianchandani, Khalil Najafi
- Publish Info
- 서울 : 대한전자공학회, 2002.
- Material Info
- pp. 273-279
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Yogesh B. Gianchandani, Khalil Najafi
- Host Item Entry
- Journal of Semiconductor Technology and Science : Volume 2, Number 4, (2002 December) 2002, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202533
MARC
008190108s2002 ulk aa eng■022 ▼a15981657
■1001 ▼aKarl J. Ma
■24510▼aThe Active Dissolved Wafer Process (ADWP) for Integrating Single Crystal Si MEMS with CMOS Circuits▼dKarl J. Ma▼e공저 Yogesh B. Gianchandani, Khalil Najafi
■260 ▼a서울▼b대한전자공학회▼c2002.
■300 ▼app. 273-279
■500 ▼a참고문헌 수록
■7001 ▼aYogesh B. Gianchandani, Khalil Najafi
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 2, Number 4, (2002 December)▼d2002, 12
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013696▼b60054120▼h8▼s2▼fP
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