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Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy
Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Young-Sik Kim
- 서명/저자
- Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy / Young-Sik Kim , 공저 Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
- 발행사항
- 서울 : 대한전자공학회, 2002.
- 형태사항
- pp. 246-252
- 주기사항
- 참고문헌 수록
- 기본자료저록
- Journal of Semiconductor Technology and Science : Volume 2, Number 4, (2002 December) 2002, 12
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202529
MARC
008190108s2002 ulk aa eng■022 ▼a15981657
■1001 ▼aYoung-Sik Kim
■24510▼aPiezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy▼dYoung-Sik Kim▼e공저 Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
■260 ▼a서울▼b대한전자공학회▼c2002.
■300 ▼app. 246-252
■500 ▼a참고문헌 수록
■7001 ▼aSeong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 2, Number 4, (2002 December)▼d2002, 12
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013696▼b60054120▼h8▼s2▼fP
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