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Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy
Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy
Detailed Information
- Material Type
- 기사
- ISSN
- 15981657
- Author
- Young-Sik Kim
- Title/Author
- Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy / Young-Sik Kim ; 공저 Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
- Publish Info
- 서울 : 대한전자공학회, 2002.
- Material Info
- pp. 246-252
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
- Host Item Entry
- Journal of Semiconductor Technology and Science : Volume 2, Number 4, (2002 December) 2002, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202529
MARC
008190108s2002 ulk aa eng■022 ▼a15981657
■1001 ▼aYoung-Sik Kim
■24510▼aPiezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy▼dYoung-Sik Kim▼e공저 Seong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
■260 ▼a서울▼b대한전자공학회▼c2002.
■300 ▼app. 246-252
■500 ▼a참고문헌 수록
■7001 ▼aSeong-Moon Cho, Caroline Sunyong Lee, Jong-Uk Bu, Jae-Wan Hong
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 2, Number 4, (2002 December)▼d2002, 12
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013696▼b60054120▼h8▼s2▼fP
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