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Analysis of Electrical Properties of Ti/Pt/Au Schottky Contacts on (n)GaAs Formed by Electron Beam Deposition and RF Sputtering
Analysis of Electrical Properties of Ti/Pt/Au Schottky Contacts on (n)GaAs Formed by Electron Beam Deposition and RF Sputtering
상세정보
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- B K Sehgal
- 서명/저자
- Analysis of Electrical Properties of Ti/Pt/Au Schottky Contacts on (n)GaAs Formed by Electron Beam Deposition and RF Sputtering / B K Sehgal , 공저 V r Balakrishnan, R Gulati, S P Tewari
- 발행사항
- 서울 : 대한전자공학회, 2003.
- 형태사항
- pp. 1-12
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202516
MARC
008190108s2003 ulk aa eng■022 ▼a15981657
■1001 ▼aB K Sehgal
■24510▼aAnalysis of Electrical Properties of Ti/Pt/Au Schottky Contacts on (n)GaAs Formed by Electron Beam Deposition and RF Sputtering▼dB K Sehgal▼e공저 V r Balakrishnan, R Gulati, S P Tewari
■260 ▼a서울▼b대한전자공학회▼c2003.
■300 ▼app. 1-12
■500 ▼a참고문헌 수록
■7001 ▼aV r Balakrishnan, R Gulati, S P Tewari
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 3, Number 1, (2003 March)▼d2003, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013697▼b60054120▼h8▼s2▼fP
