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Novel Robust Structure and High k Dielectric Material for 90 nm DRAM Capacitor
Novel Robust Structure and High k Dielectric Material for 90 nm DRAM Capacitor / Y.K. Park...
Novel Robust Structure and High k Dielectric Material for 90 nm DRAM Capacitor

Detailed Information

자료유형  
 기사
ISSN  
15981657
저자명  
Y.K. Park
서명/저자  
Novel Robust Structure and High k Dielectric Material for 90 nm DRAM Capacitor / Y.K. Park , 공저 Y.S.Ahn, K.H.Lee, C.H.Cho, T.Y. Chung, Kinam Kim
발행사항  
서울 : 대한전자공학회, 2003.
형태사항  
pp. 76-82
주기사항  
참고문헌 수록
기타저자  
Y.S.Ahn, K.H.Lee, C.H.Cho, T.Y. Chung, Kinam Kim
기본자료저록  
Journal of Semiconductor Technology and Science : Volume 3, Number 2, (2003 June) 2003, 06
원문정보  
 url
모체레코드  
모체정보확인
Control Number  
kjul:60202507

MARC

 008190108s2003        ulk                          aa    eng
■022    ▼a15981657
■1001  ▼aY.K.  Park
■24510▼aNovel  Robust  Structure  and  High  k  Dielectric  Material  for  90  nm  DRAM  Capacitor▼dY.K.  Park▼e공저  Y.S.Ahn,  K.H.Lee,  C.H.Cho,  T.Y.  Chung,  Kinam  Kim
■260    ▼a서울▼b대한전자공학회▼c2003.
■300    ▼app.  76-82
■500    ▼a참고문헌  수록
■7001  ▼aY.S.Ahn,  K.H.Lee,  C.H.Cho,  T.Y.  Chung,  Kinam  Kim
■773    ▼tJournal  of  Semiconductor  Technology  and  Science▼gVolume  3,  Number  2,  (2003  June)▼d2003,  06
■856    ▼ahttp://www.jsts.org
■SIS    ▼aS013698▼b60054120▼h8▼s2▼fP

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