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MEMS for Heterogeneous Integration of Devices and Functionality
MEMS for Heterogeneous Integration of Devices and Functionality
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Hiroyuki Fujita
- 서명/저자
- MEMS for Heterogeneous Integration of Devices and Functionality / 저 Hiroyuki Fujita
- 발행사항
- 서울 : 대한전자공학회, 2007.
- 형태사항
- pp. 133-139
- 주기사항
- 참고문헌 수록
- 기본자료저록
- Journal of Semiconductor Technology and Science : Volume 7, Number 3, (2007 September) 2007, 09
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202467
MARC
008190107s2007 ulk aa eng■022 ▼a15981657
■1001 ▼aHiroyuki Fujita
■24510▼aMEMS for Heterogeneous Integration of Devices and Functionality▼d저 Hiroyuki Fujita
■260 ▼a서울▼b대한전자공학회▼c2007.
■300 ▼app. 133-139
■500 ▼a참고문헌 수록
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 7, Number 3, (2007 September)▼d2007, 09
■856 ▼ahttp://www.jsts.org
■SIS ▼aS043240▼b60054120▼h8▼s2▼fP
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