서브메뉴
검색
Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(Co)₂ Precursor
Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(Co)₂ Precursor
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Keunwoo Lee
- Title/Author
- Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(Co)₂ Precursor / Keunwoo Lee ; Keunjun Kim ; Hyeongtag jeon ; Youngjin Lee ; Jeongtae Kim ; Seungjin Yeom
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. 1141-1146
- Added Entry-Personal Name
- Keunjun Kim
- Added Entry-Personal Name
- Hyeongtag jeon
- Added Entry-Personal Name
- Youngjin Lee
- Added Entry-Personal Name
- Jeongtae Kim
- Added Entry-Personal Name
- Seungjin Yeom
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60147737
MARC
008101209s2007 ulka a eng■022 ▼a03744884
■1001 ▼aKeunwoo Lee
■24510▼aCharacteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(Co)₂ Precursor▼dKeunwoo Lee▼eKeunjun Kim▼eHyeongtag jeon▼eYoungjin Lee▼eJeongtae Kim▼eSeungjin Yeom
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1141-1146
■7001 ▼aKeunjun Kim
■7001 ▼aHyeongtag jeon
■7001 ▼aYoungjin Lee
■7001 ▼aJeongtae Kim
■7001 ▼aSeungjin Yeom
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 4 (2007. 4)▼d2007, 04
■SIS ▼aS039453▼b60077342▼h8▼s2▼fP
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
