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Methodological Study on the Recycle of Oxide-Chemical Mechanical Polishing Slurry
Methodological Study on the Recycle of Oxide-Chemical Mechanical Polishing Slurry
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Yong-Jin Seo
- 서명/저자
- Methodological Study on the Recycle of Oxide-Chemical Mechanical Polishing Slurry / Yong-Jin Seo
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 700-707
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60147394
MARC
008101203s2007 ulka a eng■022 ▼a03744884
■1001 ▼aYong-Jin Seo
■24510▼aMethodological Study on the Recycle of Oxide-Chemical Mechanical Polishing Slurry▼dYong-Jin Seo
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 700-707
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 3 (2007. 3)▼d2007, 03
■SIS ▼aS037722▼b60077342▼h8▼s2▼fP
