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Characteristics of W-B-C-N Thin Diffusion Barrier for Cu Interconnects
Characteristics of W-B-C-N Thin Diffusion Barrier for Cu Interconnects
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Soo In Kim
- 서명/저자
- Characteristics of W-B-C-N Thin Diffusion Barrier for Cu Interconnects / Soo In Kim , Sang Yoon Kim , Dong Ho Lee , Gil Bum Kang , Chang Woo Lee
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 650-652
- 기타저자
- Sang Yoon Kim
- 기타저자
- Dong Ho Lee
- 기타저자
- Gil Bum Kang
- 기타저자
- Chang Woo Lee
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60147297
MARC
008101201s2007 ulka a eng■022 ▼a03744884
■1001 ▼aSoo In Kim
■24510▼aCharacteristics of W-B-C-N Thin Diffusion Barrier for Cu Interconnects▼dSoo In Kim▼eSang Yoon Kim▼eDong Ho Lee▼eGil Bum Kang▼eChang Woo Lee
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 650-652
■7001 ▼aSang Yoon Kim
■7001 ▼aDong Ho Lee
■7001 ▼aGil Bum Kang
■7001 ▼aChang Woo Lee
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 3 (2007. 3)▼d2007, 03
■SIS ▼aS037722▼b60077342▼h8▼s2▼fP
