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A Study on the Electrochemical and the Chemical Mechanical Polishing Behaviors of W and Ti Film
A Study on the Electrochemical and the Chemical Mechanical Polishing Behaviors of W and Ti Film
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Yong-Jin Seo
- 서명/저자
- A Study on the Electrochemical and the Chemical Mechanical Polishing Behaviors of W and Ti Film / Yong-Jin Seo , Sung-woo Park
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 643-649
- 기타저자
- Sung-woo Park
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60147296
MARC
008101201s2007 ulka a eng■022 ▼a03744884
■1001 ▼aYong-Jin Seo
■24510▼aA Study on the Electrochemical and the Chemical Mechanical Polishing Behaviors of W and Ti Film▼dYong-Jin Seo▼eSung-woo Park
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 643-649
■7001 ▼aSung-woo Park
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 3 (2007. 3)▼d2007, 03
■SIS ▼aS037722▼b60077342▼h8▼s2▼fP
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