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Reliability Issues and Role of Defects in High-k Dielectric HfO₂Devices
Reliability Issues and Role of Defects in High-k Dielectric HfO₂Devices
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Joongoo Kang
- 서명/저자
- Reliability Issues and Role of Defects in High-k Dielectric HfO₂Devices / Joongoo Kang , Dae Yeon Kim , K. J. Chang
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 552-557
- 기타저자
- Dae Yeon Kim
- 기타저자
- K. J. Chang
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60147056
MARC
008101125s2007 ulka a eng■022 ▼a03744884
■1001 ▼aJoongoo Kang
■24510▼aReliability Issues and Role of Defects in High-k Dielectric HfO₂Devices ▼dJoongoo Kang▼eDae Yeon Kim▼eK. J. Chang
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 552-557
■7001 ▼aDae Yeon Kim
■7001 ▼aK. J. Chang
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 3 (2007. 3)▼d2007, 03
■SIS ▼aS037722▼b60077342▼h8▼s2▼fP
