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Photoresist spray Coating for Resist Film Performance of Deep Silicon Cavities
Photoresist spray Coating for Resist Film Performance of Deep Silicon Cavities
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Duk-Soo Eun
- 서명/저자
- Photoresist spray Coating for Resist Film Performance of Deep Silicon Cavities / Duk-Soo Eun , Do-Wok Kim , Chang-Taeg Seo , Jong-Hyun Lee , Young-Ho Bae , In-Sik Yu , Chang-Gil Suk
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1947-1951
- 기타저자
- Do-Wok Kim
- 기타저자
- Chang-Taeg Seo
- 기타저자
- Jong-Hyun Lee
- 기타저자
- Young-Ho Bae
- 기타저자
- In-Sik Yu
- 기타저자
- Chang-Gil Suk
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146392
MARC
008101115s2007 ulka a eng■022 ▼a03744884
■1001 ▼aDuk-Soo Eun
■24510▼aPhotoresist spray Coating for Resist Film Performance of Deep Silicon Cavities▼dDuk-Soo Eun▼eDo-Wok Kim▼eChang-Taeg Seo▼eJong-Hyun Lee▼eYoung-Ho Bae▼eIn-Sik Yu▼eChang-Gil Suk
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1947-1951
■7001 ▼aDo-Wok Kim
■7001 ▼aChang-Taeg Seo
■7001 ▼aJong-Hyun Lee
■7001 ▼aYoung-Ho Bae
■7001 ▼aIn-Sik Yu
■7001 ▼aChang-Gil Suk
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
