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Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET
Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Soon-Yen Jung
- Title/Author
- Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET / Soon-Yen Jung ; Yong-Jin Kim ; Won-Jae Lee ; Ying-Ying Zhang ; Zhun Zhong ; Shi-guang Li ; In-Ho Kang ; Ga-Won Lee ; Jin-Suk Wang ; Hi-deok Lee ; Yeong-Cheol Kim
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. 1883-1886
- Added Entry-Personal Name
- Yong-Jin Kim
- Added Entry-Personal Name
- Won-Jae Lee
- Added Entry-Personal Name
- Ying-Ying Zhang
- Added Entry-Personal Name
- Zhun Zhong
- Added Entry-Personal Name
- Shi-guang Li
- Added Entry-Personal Name
- In-Ho Kang
- Added Entry-Personal Name
- Ga-Won Lee
- Added Entry-Personal Name
- Jin-Suk Wang
- Added Entry-Personal Name
- Hi-deok Lee
- Added Entry-Personal Name
- Yeong-Cheol Kim
- Added Entry-Personal Name
- Ji-Young Kim
- Added Entry-Personal Name
- Hyuk Hyun Ryu
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146348
MARC
008101111s2007 ulka a eng■022 ▼a03744884
■1001 ▼aSoon-Yen Jung
■24510▼aCharacterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET▼dSoon-Yen Jung▼eYong-Jin Kim▼eWon-Jae Lee▼eYing-Ying Zhang▼eZhun Zhong▼eShi-guang Li▼eIn-Ho Kang▼eGa-Won Lee▼eJin-Suk Wang▼eHi-deok Lee▼eYeong-Cheol Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1883-1886
■7001 ▼aYong-Jin Kim
■7001 ▼aWon-Jae Lee
■7001 ▼aYing-Ying Zhang
■7001 ▼aZhun Zhong
■7001 ▼aShi-guang Li
■7001 ▼aIn-Ho Kang
■7001 ▼aGa-Won Lee
■7001 ▼aJin-Suk Wang
■7001 ▼aHi-deok Lee
■7001 ▼aYeong-Cheol Kim
■7001 ▼aJi-Young Kim
■7001 ▼aHyuk Hyun Ryu
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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