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Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET
Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Soon-Yen Jung
- 서명/저자
- Characterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET / Soon-Yen Jung , Yong-Jin Kim , Won-Jae Lee , Ying-Ying Zhang , Zhun Zhong , Shi-guang Li , In-Ho Kang , Ga-Won Lee , Jin-Suk Wang , Hi-deok Lee , Yeong-Cheol Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1883-1886
- 기타저자
- Yong-Jin Kim
- 기타저자
- Won-Jae Lee
- 기타저자
- Ying-Ying Zhang
- 기타저자
- Zhun Zhong
- 기타저자
- Shi-guang Li
- 기타저자
- In-Ho Kang
- 기타저자
- Ga-Won Lee
- 기타저자
- Jin-Suk Wang
- 기타저자
- Hi-deok Lee
- 기타저자
- Yeong-Cheol Kim
- 기타저자
- Ji-Young Kim
- 기타저자
- Hyuk Hyun Ryu
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146348
MARC
008101111s2007 ulka a eng■022 ▼a03744884
■1001 ▼aSoon-Yen Jung
■24510▼aCharacterization of the dopant Dependence of Ni-silicide on a SOI Substrate for a Nano-Scale CMOSFET▼dSoon-Yen Jung▼eYong-Jin Kim▼eWon-Jae Lee▼eYing-Ying Zhang▼eZhun Zhong▼eShi-guang Li▼eIn-Ho Kang▼eGa-Won Lee▼eJin-Suk Wang▼eHi-deok Lee▼eYeong-Cheol Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1883-1886
■7001 ▼aYong-Jin Kim
■7001 ▼aWon-Jae Lee
■7001 ▼aYing-Ying Zhang
■7001 ▼aZhun Zhong
■7001 ▼aShi-guang Li
■7001 ▼aIn-Ho Kang
■7001 ▼aGa-Won Lee
■7001 ▼aJin-Suk Wang
■7001 ▼aHi-deok Lee
■7001 ▼aYeong-Cheol Kim
■7001 ▼aJi-Young Kim
■7001 ▼aHyuk Hyun Ryu
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
