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Time-Characteristics of ZrO₂ Thin films Deposited by Reactive Magnetron Sputtering
Time-Characteristics of ZrO₂ Thin films Deposited by Reactive Magnetron Sputtering
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Jae Hwan Ko
- 서명/저자
- Time-Characteristics of ZrO₂ Thin films Deposited by Reactive Magnetron Sputtering / Jae Hwan Ko , Soo Ho Kim , Seung Hyun Jee , Young Soo Yoon , Dong-Joo Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1843-1847
- 기타저자
- Soo Ho Kim
- 기타저자
- Seung Hyun Jee
- 기타저자
- Young Soo Yoon
- 기타저자
- Dong-Joo Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146319
MARC
008101110s2007 ulka a eng■022 ▼a03744884
■1001 ▼aJae Hwan Ko
■24510▼aTime-Characteristics of ZrO₂ Thin films Deposited by Reactive Magnetron Sputtering▼dJae Hwan Ko▼eSoo Ho Kim▼eSeung Hyun Jee▼eYoung Soo Yoon▼eDong-Joo Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1843-1847
■7001 ▼aSoo Ho Kim
■7001 ▼aSeung Hyun Jee
■7001 ▼aYoung Soo Yoon
■7001 ▼aDong-Joo Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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