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Properties of In₂O₃-SnO₂Thin Films due to the Cathode Condition in the DC Magnetron Sputtering Process
Properties of In₂O₃-SnO₂Thin Films due to the Cathode Condition in the DC Magnetron Sputtering Process
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- S.-W. Ryu
- 서명/저자
- Properties of In₂O₃-SnO₂Thin Films due to the Cathode Condition in the DC Magnetron Sputtering Process / S.-W. Ryu , J.-S. Hong , S.-T. Kim J.-Y. Yang , B.-C. Ahn , W.-P. Hong , S.-H. Park , H.-M. Kim , J.-J. Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1833-1837
- 기타저자
- J.-S. Hong
- 기타저자
- S.-T. Kim J.-Y. Yang
- 기타저자
- B.-C. Ahn
- 기타저자
- W.-P. Hong
- 기타저자
- S.-H. Park
- 기타저자
- H.-M. Kim
- 기타저자
- J.-J. Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60146099
MARC
008101028s2007 ulka a eng■022 ▼a03744884
■1001 ▼aS.-W. Ryu
■24510▼aProperties of In₂O₃-SnO₂Thin Films due to the Cathode Condition in the DC Magnetron Sputtering Process▼dS.-W. Ryu▼eJ.-S. Hong▼eS.-T. Kim J.-Y. Yang▼eB.-C. Ahn▼eW.-P. Hong▼eS.-H. Park▼eH.-M. Kim▼eJ.-J. Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1833-1837
■7001 ▼aJ.-S. Hong
■7001 ▼aS.-T. Kim J.-Y. Yang
■7001 ▼aB.-C. Ahn
■7001 ▼aW.-P. Hong
■7001 ▼aS.-H. Park
■7001 ▼aH.-M. Kim
■7001 ▼aJ.-J. Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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