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Photon-Stimulated H Desorption from Several H/Si(001) Surfaces for Resistless Lithography
Photon-Stimulated H Desorption from Several H/Si(001) Surfaces for Resistless Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Cheolho Jeon
- 서명/저자
- Photon-Stimulated H Desorption from Several H/Si(001) Surfaces for Resistless Lithography / Cheolho Jeon , Chong-Yun Park , Chan-Cuk Hwang , Han-Na Hwang , Hajin Song , Hyun-Joon Shin , Sangwoon Moon , Sukmin Chung
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1745-1749
- 기타저자
- Chong-Yun Park
- 기타저자
- Chan-Cuk Hwang
- 기타저자
- Han-Na Hwang
- 기타저자
- Hajin Song
- 기타저자
- Hyun-Joon Shin
- 기타저자
- Sangwoon Moon
- 기타저자
- Sukmin Chung
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145926
MARC
008101027s2007 ulka a eng■022 ▼a03744884
■1001 ▼aCheolho Jeon
■24510▼aPhoton-Stimulated H Desorption from Several H/Si(001) Surfaces for Resistless Lithography▼dCheolho Jeon▼eChong-Yun Park▼eChan-Cuk Hwang▼eHan-Na Hwang▼eHajin Song▼eHyun-Joon Shin▼eSangwoon Moon▼eSukmin Chung
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1745-1749
■7001 ▼aChong-Yun Park
■7001 ▼aChan-Cuk Hwang
■7001 ▼aHan-Na Hwang
■7001 ▼aHajin Song
■7001 ▼aHyun-Joon Shin
■7001 ▼aSangwoon Moon
■7001 ▼aSukmin Chung
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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