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Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition
Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- E. H. Kim
- 서명/저자
- Low-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition / E. H. Kim , D. H. Lee , B. H. chung , H. S. Kim , Y. Kim , S. J. Noh
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. 1716-1718
- 기타저자
- D. H. Lee
- 기타저자
- B. H. chung
- 기타저자
- H. S. Kim
- 기타저자
- Y. Kim
- 기타저자
- S. J. Noh
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145909
MARC
008101027s2007 ulka a eng■022 ▼a03744884
■1001 ▼aE. H. Kim
■24510▼aLow-Temperature Growth of ZnO Thin Films by Atomic Layer Deposition▼dE. H. Kim▼eD. H. Lee▼eB. H. chung▼eH. S. Kim▼eY. Kim▼eS. J. Noh
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. 1716-1718
■7001 ▼aD. H. Lee
■7001 ▼aB. H. chung
■7001 ▼aH. S. Kim
■7001 ▼aY. Kim
■7001 ▼aS. J. Noh
■773 ▼tJournal of The Korean Physical Society▼gVol. 50 No. 6 (2007. 6)▼d2007, 06
■SIS ▼aS040681▼b60077342▼h8▼s2▼fP
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