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Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process
Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Jun-Gu Lee
- 서명/저자
- Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process / Jun-Gu Lee , Taeyoung Won
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. S807-S811
- 기타저자
- Taeyoung Won
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145412
MARC
008101018s2007 ulka a eng■022 ▼a03744884
■1001 ▼aJun-Gu Lee
■24510▼aComputer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process▼dJun-Gu Lee▼eTaeyoung Won
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S807-S811
■7001 ▼aTaeyoung Won
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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