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Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process
Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Proces...
Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process

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자료유형  
 기사
ISSN  
03744884
저자명  
Jun-Gu Lee
서명/저자  
Computer simulation of a Complex MEMS Structure Processed by an Anisotropic Etching Process / Jun-Gu Lee , Taeyoung Won
발행사항  
서울 : 한국물리학회, 2007.
형태사항  
pp. S807-S811
기타저자  
Taeyoung Won
기본자료저록  
Journal of The Korean Physical Society : Vol. 49 supplementary isssu III.(2006.12) 2007, 01
모체레코드  
모체정보확인
Control Number  
kjul:60145412

MARC

 008101018s2007        ulka    a                          eng
■022    ▼a03744884
■1001  ▼aJun-Gu  Lee
■24510▼aComputer  simulation  of  a  Complex  MEMS  Structure  Processed  by  an  Anisotropic  Etching  Process▼dJun-Gu  Lee▼eTaeyoung  Won
■260    ▼a서울▼b한국물리학회▼c2007.
■300    ▼app.  S807-S811
■7001  ▼aTaeyoung  Won
■773    ▼tJournal  of  The  Korean  Physical  Society▼gVol.  49  supplementary  isssu  III.(2006.12)▼d2007,  01
■SIS    ▼aS036912▼b60077342▼h8▼s2▼fP

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