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Electrical and Reliability Characteristics of HfO₂ MOS Capacitor with Mo Metal Gate Electrode
Electrical and Reliability Characteristics of HfO₂ MOS Capacitor with Mo Metal Gate Electrode
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- In-Sung Park
- Title/Author
- Electrical and Reliability Characteristics of HfO₂ MOS Capacitor with Mo Metal Gate Electrode / In-Sung Park ; Taeho Lee ; Hankyong Ko ; Jinho Ahn
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. S760-S763
- Added Entry-Personal Name
- Taeho Lee
- Added Entry-Personal Name
- Hankyong Ko
- Added Entry-Personal Name
- Jinho Ahn
- Host Item Entry
- Journal of The Korean Physical Society : Vol. 49 supplementary isssu III.(2006.12) 2007, 01
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145403
MARC
008101018s2007 ulka a eng■022 ▼a03744884
■1001 ▼aIn-Sung Park
■24510▼aElectrical and Reliability Characteristics of HfO₂ MOS Capacitor with Mo Metal Gate Electrode▼dIn-Sung Park▼eTaeho Lee▼eHankyong Ko▼eJinho Ahn
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S760-S763
■7001 ▼aTaeho Lee
■7001 ▼aHankyong Ko
■7001 ▼aJinho Ahn
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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