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Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models
Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Seok-Hwan Lee
- 서명/저자
- Plasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models / Seok-Hwan Lee , Gon-Ho Kim
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. S726-S731
- 기타저자
- Gon-Ho Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145310
MARC
008101015s2007 ulka a eng■022 ▼a03744884
■1001 ▼aSeok-Hwan Lee
■24510▼aPlasma Density Monitoring Based on the Capacitively- and Inductively-Coupled-Plasma Models▼dSeok-Hwan Lee▼eGon-Ho Kim
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S726-S731
■7001 ▼aGon-Ho Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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