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Fabrication of Two-Dimensional Periodic Structures in an Amorphous Silicon Film by Four-Beam Interference Lithography
Fabrication of Two-Dimensional Periodic Structures in an Amorphous Silicon Film by Four-Beam Interference Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Geon Joon Lee
- 서명/저자
- Fabrication of Two-Dimensional Periodic Structures in an Amorphous Silicon Film by Four-Beam Interference Lithography / Geon Joon Lee , Youngpak Lee , Kyung-Rae Kim , Moon Ik Jang , Chong Seung Yoon , Jinho Ahn , Yong-Duck Son , Jin Jang
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. S716-S720
- 기타저자
- Youngpak Lee
- 기타저자
- Kyung-Rae Kim
- 기타저자
- Moon Ik Jang
- 기타저자
- Chong Seung Yoon
- 기타저자
- Jinho Ahn
- 기타저자
- Yong-Duck Son
- 기타저자
- Jin Jang
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145301
MARC
008101015s2007 ulka a eng■022 ▼a03744884
■1001 ▼aGeon Joon Lee
■24510▼aFabrication of Two-Dimensional Periodic Structures in an Amorphous Silicon Film by Four-Beam Interference Lithography▼dGeon Joon Lee▼eYoungpak Lee▼eKyung-Rae Kim▼eMoon Ik Jang▼eChong Seung Yoon▼eJinho Ahn▼eYong-Duck Son▼eJin Jang
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S716-S720
■7001 ▼aYoungpak Lee
■7001 ▼aKyung-Rae Kim
■7001 ▼aMoon Ik Jang
■7001 ▼aChong Seung Yoon
■7001 ▼aJinho Ahn
■7001 ▼aYong-Duck Son
■7001 ▼aJin Jang
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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