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Sub-60-nm Lithography Patterns by Low-Energy Microcolumn Lithography
Sub-60-nm Lithography Patterns by Low-Energy Microcolumn Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- H. S. Kim
- 서명/저자
- Sub-60-nm Lithography Patterns by Low-Energy Microcolumn Lithography / H. S. Kim , S. Ahn , D. W. Kim , Y. C. Kim , H. W. Kim , S. J. Ahn
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. S712-S715
- 기타저자
- S. Ahn
- 기타저자
- D. W. Kim
- 기타저자
- Y. C. Kim
- 기타저자
- H. W. Kim
- 기타저자
- S. J. Ahn
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145288
MARC
008101014s2007 ulka a eng■022 ▼a03744884
■1001 ▼aH. S. Kim
■24510▼aSub-60-nm Lithography Patterns by Low-Energy Microcolumn Lithography▼dH. S. Kim▼eS. Ahn▼eD. W. Kim▼eY. C. Kim▼eH. W. Kim▼eS. J. Ahn
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S712-S715
■7001 ▼aS. Ahn
■7001 ▼aD. W. Kim
■7001 ▼aY. C. Kim
■7001 ▼aH. W. Kim
■7001 ▼aS. J. Ahn
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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