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An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask
An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Woo-Jung Kim
- Title/Author
- An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask / Woo-Jung Kim ; Yong-Ho Oh ; Jai-Cheol Lee ; Sung-Woo Lim ; Chun Soo Go
- Publish Info
- 서울 : 한국물리학회, 2007.
- Material Info
- pp. S707-S711
- Added Entry-Personal Name
- Yong-Ho Oh
- Added Entry-Personal Name
- Jai-Cheol Lee
- Added Entry-Personal Name
- Sung-Woo Lim
- Added Entry-Personal Name
- Chun Soo Go
- Host Item Entry
- Journal of The Korean Physical Society : Vol. 49 supplementary isssu III.(2006.12) 2007, 01
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145286
MARC
008101014s2007 ulka a eng■022 ▼a03744884
■1001 ▼aWoo-Jung Kim
■24510▼aAn Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask▼dWoo-Jung Kim▼eYong-Ho Oh▼eJai-Cheol Lee▼eSung-Woo Lim▼eChun Soo Go
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S707-S711
■7001 ▼aYong-Ho Oh
■7001 ▼aJai-Cheol Lee
■7001 ▼aSung-Woo Lim
■7001 ▼aChun Soo Go
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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