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An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask
An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Woo-Jung Kim
- 서명/저자
- An Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask / Woo-Jung Kim , Yong-Ho Oh , Jai-Cheol Lee , Sung-Woo Lim , Chun Soo Go
- 발행사항
- 서울 : 한국물리학회, 2007.
- 형태사항
- pp. S707-S711
- 기타저자
- Yong-Ho Oh
- 기타저자
- Jai-Cheol Lee
- 기타저자
- Sung-Woo Lim
- 기타저자
- Chun Soo Go
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145286
MARC
008101014s2007 ulka a eng■022 ▼a03744884
■1001 ▼aWoo-Jung Kim
■24510▼aAn Analysis of Boundary Effects of Regionally Applied Modified Illumination with DOE at the Back Surface of a Photomask▼dWoo-Jung Kim▼eYong-Ho Oh▼eJai-Cheol Lee▼eSung-Woo Lim▼eChun Soo Go
■260 ▼a서울▼b한국물리학회▼c2007.
■300 ▼app. S707-S711
■7001 ▼aYong-Ho Oh
■7001 ▼aJai-Cheol Lee
■7001 ▼aSung-Woo Lim
■7001 ▼aChun Soo Go
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 supplementary isssu III.(2006.12)▼d2007, 01
■SIS ▼aS036912▼b60077342▼h8▼s2▼fP
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