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Development of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge
Development of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge
상세정보
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Hyung-Yong Kim
- 서명/저자
- Development of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge / Hyung-Yong Kim , Deuk-chul Kwon , Nam-sik Yoon , Hee-Hwan Choe , Jung-Hyung Kim
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1967-1971
- 기타저자
- Deuk-chul Kwon
- 기타저자
- Nam-sik Yoon
- 기타저자
- Hee-Hwan Choe
- 기타저자
- Jung-Hyung Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145149
MARC
008101014s2006 ulka a eng■022 ▼a03744884
■1001 ▼aHyung-Yong Kim
■24510▼aDevelopment of New Method for Fluid Simulation of Capacitively Coupled Plasma Discharge▼dHyung-Yong Kim▼eDeuk-chul Kwon▼eNam-sik Yoon▼eHee-Hwan Choe▼eJung-Hyung Kim
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1967-1971
■7001 ▼aDeuk-chul Kwon
■7001 ▼aNam-sik Yoon
■7001 ▼aHee-Hwan Choe
■7001 ▼aJung-Hyung Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 5 (2006. 11)▼d2006, 11
■SIS ▼aS036672▼b60077342▼h8▼s2▼fP
