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Effects of Process Parameter for LiNbO₃ Optical Waveguide Prepared by Neutral Loop Discharge Plasma Etching
Effects of Process Parameter for LiNbO₃ Optical Waveguide Prepared by Neutral Loop Discharge Plasma Etching
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- W. J. Park
- 서명/저자
- Effects of Process Parameter for LiNbO₃ Optical Waveguide Prepared by Neutral Loop Discharge Plasma Etching / W. J. Park , S. G. Yoon , D. H. Yoon , W. S. Yang
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1951-1954
- 기타저자
- S. G. Yoon
- 기타저자
- D. H. Yoon
- 기타저자
- W. S. Yang
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60145145
MARC
008101014s2006 ulka a eng■022 ▼a03744884
■1001 ▼aW. J. Park
■24510▼aEffects of Process Parameter for LiNbO₃ Optical Waveguide Prepared by Neutral Loop Discharge Plasma Etching▼dW. J. Park▼eS. G. Yoon▼eD. H. Yoon▼eW. S. Yang
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1951-1954
■7001 ▼aS. G. Yoon
■7001 ▼aD. H. Yoon
■7001 ▼aW. S. Yang
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 5 (2006. 11)▼d2006, 11
■SIS ▼aS036672▼b60077342▼h8▼s2▼fP
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