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Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Detailed Information
- Material Type
- 기사
- ISSN
- 03744884
- Author
- Won-Ki Kim
- Title/Author
- Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas / Won-Ki Kim ; Min-Hyong Lee ; Chin-Wook Chung ; Jung-Hyung Kim
- Publish Info
- 서울 : 한국물리학회, 2006.
- Material Info
- pp. 1687-1690
- Added Entry-Personal Name
- Min-Hyong Lee
- Added Entry-Personal Name
- Chin-Wook Chung
- Added Entry-Personal Name
- Jung-Hyung Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144932
MARC
008101012s2006 ulka a eng■022 ▼a03744884
■1001 ▼aWon-Ki Kim
■24510▼aComparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas▼dWon-Ki Kim▼eMin-Hyong Lee▼eChin-Wook Chung▼eJung-Hyung Kim
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1687-1690
■7001 ▼aMin-Hyong Lee
■7001 ▼aChin-Wook Chung
■7001 ▼aJung-Hyung Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
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