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Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas
Detailed Information
- 자료유형
- 기사
- ISSN
- 03744884
- 저자명
- Won-Ki Kim
- 서명/저자
- Comparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas / Won-Ki Kim , Min-Hyong Lee , Chin-Wook Chung , Jung-Hyung Kim
- 발행사항
- 서울 : 한국물리학회, 2006.
- 형태사항
- pp. 1687-1690
- 기타저자
- Min-Hyong Lee
- 기타저자
- Chin-Wook Chung
- 기타저자
- Jung-Hyung Kim
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60144932
MARC
008101012s2006 ulka a eng■022 ▼a03744884
■1001 ▼aWon-Ki Kim
■24510▼aComparison of Plasma Densities Measured by Using Electrical Probes to Those measured by Using Microwave Probes in Inductively Coupled Plasmas▼dWon-Ki Kim▼eMin-Hyong Lee▼eChin-Wook Chung▼eJung-Hyung Kim
■260 ▼a서울▼b한국물리학회▼c2006.
■300 ▼app. 1687-1690
■7001 ▼aMin-Hyong Lee
■7001 ▼aChin-Wook Chung
■7001 ▼aJung-Hyung Kim
■773 ▼tJournal of The Korean Physical Society▼gVol. 49 No. 4 (2006. 10)▼d2006, 10
■SIS ▼aS035357▼b60077342▼h8▼s2▼fP
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